[EN] A DIAMINE COMPOUND OR ITS SALT, PREPARING METHOD OF THE SAME, AND USES OF THE SAME [FR] COMPOSÉ DIAMINE OU SON SEL, PROCÉDÉ POUR LE PRÉPARER, ET SES UTILISATIONS
[EN] A DIAMINE COMPOUND OR ITS SALT, PREPARING METHOD OF THE SAME, AND USES OF THE SAME [FR] COMPOSÉ DIAMINE OU SON SEL, PROCÉDÉ POUR LE PRÉPARER, ET SES UTILISATIONS
[EN] A DIAMINE COMPOUND OR ITS SALT, PREPARING METHOD OF THE SAME, AND USES OF THE SAME<br/>[FR] COMPOSÉ DIAMINE OU SON SEL, PROCÉDÉ POUR LE PRÉPARER, ET SES UTILISATIONS
申请人:UP CHEMICAL CO LTD
公开号:WO2012176989A1
公开(公告)日:2012-12-27
The present disclosure relates to a diamine compound or its salt having utility for preparing an organometallic compound suitable for vapor phase deposition processes such as a chemical vapor deposition (CVD) method or an atomic layer deposition (ALD) method.