申请人:Robinson Alex
公开号:US20120251953A1
公开(公告)日:2012-10-04
Certain methanofullerene derivatives are described, having side chains with acid-labile protecting groups. The methanofullerene derivatives may find application as photoresist materials, and particularly as positive-tone photoresists.
描述了某些具有酸敏保护基的甲烷富勒烯衍生物。这些甲烷富勒烯衍生物可能被用作光刻胶材料,特别是作为正相光刻胶。