To provide an acrylamide derivative which can form a structural unit of a polymer to be incorporated into a photoresist composition, a polymer produced through polymerization of a raw material containing the acrylamide derivative, and a photoresist composition which contains the polymer and which, as compared with the case of conventional ones, realizes formation of a high-resolution resist pattern having improved LWR. The invention provides an acrylamide derivative represented by the following formula (1):
wherein R
1
represents a hydrogen atom, a methyl group, or a trifluoromethyl group; W represents a C1 to C10 alkylene group or a C3 to C10 cycloalkylene group; R
2
represents a cyclic group having 3 to 20 ring-forming atoms and represented by the following formula (2):
wherein X represents an oxygen atom or >N—R
3
; R
3
represents a hydrogen atom or a C1 to C5 alkyl group; Y represents >C═O or >S(═O)
n
; and n is an integer of 0 to 2.
为提供一种可以形成聚合物结构单元的
丙烯酰胺衍
生物,该聚合物可纳入到光刻胶组合物中,通过含有该
丙烯酰胺衍
生物的原料的聚合制备的聚合物以及包含该聚合物的光刻胶组合物,与传统情况相比,实现了形成具有改善LWR的高分辨率光刻胶图案。该发明提供了由以下公式(1)表示的
丙烯酰胺衍
生物:其中R1代表氢原子、甲基或三
氟甲基;W代表C1到C10的烷基或C3到C10的环烷基;R2代表具有3到20个环形成原子的环状基团,由以下公式(2)表示:其中X代表氧原子或>N—R3;R3代表氢原子或C1到C5的烷基;Y代表>C═O或>S(═O)n;n为0到2的整数。