A resin composition comprises a polymer comprising a structural unit that comprises a group represented by formula (1), and a solvent. In the formula (1), R
1
to R
4
each independently represent a hydrogen atom, a fluorine atom or a monovalent organic group having 1 to 20 carbon atoms, wherein at least one of R
1
to R
4
has the fluorine atom or a group including the fluorine atom. R
5
represents a substituted or unsubstituted trivalent chain hydrocarbon group having 1 to 7 carbon atoms. * denotes a binding site to other moiety of the structural unit. The structural unit is preferably represented by any one of formulae (2-1) to (2-3). In the formulae (2-1) to (2-3), Z represents a group represented by formula (1).
一种
树脂组合物,包括聚合物和溶剂。该聚合物包括一个结构单元,该结构单元包括由公式(1)表示的基团,其中在公式(1)中,R1至R4分别独立地表示氢原子、
氟原子或具有1至20个碳原子的单价有机基团,其中至少有一个R1至R4包括
氟原子或包括
氟原子的基团。R5表示具有1至7个碳原子的取代或未取代的三价链烃基团。*表示与结构单元的其他部分结合的位点。该结构单元最好由公式(2-1)至(2-3)中的任何一个表示。在公式(2-1)至(2-3)中,Z表示由公式(1)表示的基团。