RADIATION-SENSITIVE RESIN COMPOSITION, RESIST PATTERN-FORMING METHOD, POLYMER, AND METHOD FOR PRODUCING COMPOUND
申请人:JSR CORPORATION
公开号:US20150323866A1
公开(公告)日:2015-11-12
A radiation-sensitive resin composition contains: a polymer having a structural unit that includes a group represented by formula (1); a radiation-sensitive acid generator; and an organic solvent. In the formula (1), R
P
represents a hydrogen atom or a monovalent organic group, and * denotes a binding site to a rest of the structural unit other than the group represented by the formula (1). It is preferred that R
P
in the formula (1) represents a monovalent organic group, and the monovalent organic group is an acid-nonlabile group. It is also preferred that R
P
in the formula (1) represents a monovalent organic group, and the monovalent organic group is an acid-labile group.
A monohydroxyalkyl, perfluorotertiaryalkyl ether, said monohydroxylalkyl group having no more than 16 carbon atoms and said perfluorotertiary alkyl group having the structure ##EQU1## where R.sub.f is a perfluoroalkyl group of less than 10 carbon atoms.
PATTERN-FORMING METHOD, AND RADIATION-SENSITIVE COMPOSITION
申请人:JSR CORPORATION
公开号:US20130230804A1
公开(公告)日:2013-09-05
A pattern-forming method includes providing a resist film on a substrate using a radiation-sensitive composition. The resist film is exposed. The exposed resist film is developed using a developer solution. The developer solution includes no less than 80% by mass of an organic solvent. The radiation-sensitive composition includes at least two components including a first polymer and a radiation-sensitive acid generator. The first polymer includes a structural unit having an acid-labile group. One or more components of the radiation-sensitive composition have a group represented by a formula (1). A
−
represents —N
−
—SO
2
—R
D
, —COO
−
, —O
−
or —SO
3
−
. —SO
3
−
does not directly bond to a carbon atom having a fluorine atom. R
D
represents a linear or branched monovalent hydrocarbon group, or the like. X
+
represents an onium cation.
-A
−
X
+
(1)
RESIN COMPOSITION, RESIST PATTERN-FORMING METHOD AND POLYMER
申请人:JSR CORPORATION
公开号:US20160185999A1
公开(公告)日:2016-06-30
A resin composition comprises a polymer comprising a structural unit that comprises a group represented by formula (1), and a solvent. In the formula (1), R
1
to R
4
each independently represent a hydrogen atom, a fluorine atom or a monovalent organic group having 1 to 20 carbon atoms, wherein at least one of R
1
to R
4
has the fluorine atom or a group including the fluorine atom. R
5
represents a substituted or unsubstituted trivalent chain hydrocarbon group having 1 to 7 carbon atoms. * denotes a binding site to other moiety of the structural unit. The structural unit is preferably represented by any one of formulae (2-1) to (2-3). In the formulae (2-1) to (2-3), Z represents a group represented by formula (1).
HEXAFLUORONEOPENTYL ALCOHOL, ITS DERIVATIVES, FLUORINATED POLYMERS AND THEIR USE
申请人:DAIKIN INDUSTRIES, LIMITED
公开号:EP0364587A1
公开(公告)日:1990-04-25
This invention provides (i) novel hexafluoroneopentyl alcohol, (ii) its derivatives, i.e., hexafluoroneopentyl (meth)acrylate, (iii) fluorinated polymers comprising said acrylate as the monomer component, and (iv) optical materials comprising said fluorinated polymers.