Allyliodide reacts in situ with cerium amalgam to generate allyl cerium iodide, which in turn reacts with ketones to yield homoallylic alcohols in good yields.
烯丙基碘化物与铈汞齐原位反应生成烯丙基碘化铈,后者又与酮反应生成高收率的均烯丙基醇。
POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
申请人:HATAKEYAMA Jun
公开号:US20110171580A1
公开(公告)日:2011-07-14
A positive resist composition comprising a polymer having a tetrahydrobenzocycloheptane-substituted secondary or tertiary carboxyl group ester as an acid labile group exhibits a high contrast of alkaline dissolution rate before and after exposure, a high resolution, a good pattern profile and minimal edge roughness after exposure, a significant effect of suppressing acid diffusion rate, and improved etching resistance.