N, N'-di-tert-amyl-1,4-diaza-1,3-butadiene;(tPeNCHCHNtPe);N,N'-di(tert-pentyl)-1,4-diaza-1,3-butadiene;N.N'-Bis-(1.1-dimethylpropyl)-1.2-diiminoethan;Bis(1,1-dimethylpropyl)diimin;N,N'-bis(2-methylbutan-2-yl)ethane-1,2-diimine
TUNGSTEN PRECURSOR AND METHOD OF FORMING TUNGSTEN CONTAINING LAYER USING THE SAME
申请人:Samsung Electronics Co., Ltd.
公开号:US20180363131A1
公开(公告)日:2018-12-20
Disclosed is a tungsten precursor and a method of forming a tungsten-containing layer. The tungsten precursor has a structure represented by Formula 1 below.
In Formula 1, R
1
, R
2
, and R
3
independently include a straight-chained or a branched alkyl group including a substituted or an unsubstituted C1-C5; R
4
and R
5
independently include a straight-chained or a branched alkyl group including a C1-C5, halogen element, dialkylamino group having C2-C10, or trialkylsilyl group including a C3-C12; n is 1 or 2, and m is 0 or 1. Also, n+m=2 (e.g., when n is 1, m is 1). When n is 2, m is 0 and each of R
1
and R
2
are provided in two. Two R
1
s are independently of each other, and two R
2
s are independently of each other.
A Silyl Radical formed by Muonium Addition to a Silylene
作者:Amitabha Mitra、Jean-Claude Brodovitch、Clemens Krempner、Paul W. Percival、Pooja Vyas、Robert West
DOI:10.1002/anie.201000166
日期:2010.4.6
Muonraker: Irradiation of the stable silylene N,N′‐bis(2,6‐diisopropylphenyl)‐1,3‐diaza‐2‐silacyclopent‐4‐en‐2‐ylidene with muons produced a radical that was identified as the monomeric muonium adduct from its muon spin rotation (μSR) spectrum. The muon hyperfine constant for this radical is 931 MHz, the largest ever recorded for a free radical.
HYDROSILANE DERIVATIVE, METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUCING SILICON-CONTAINING THIN FILM
申请人:Tosoh Corporation
公开号:EP2581377B1
公开(公告)日:2015-07-29
TITANIUM COMPLEX, PROCESSES FOR PRODUCING THE SAME, TITANIUM-CONTAINING THIN FILM, AND PROCESS FOR PRODUCING THE SAME
申请人:Tada Ken-ichi
公开号:US20120029220A1
公开(公告)日:2012-02-02
A subject for the invention is to provide novel titanium complexes which have a high vapor pressure and high thermal stability and serve as an excellent material for producing a titanium-containing thin film by a technique such as the CVD method or ALD method and to further provide processes for producing these complexes, titanium-containing thin films produced from the complexes, and a process for producing the thin films. The invention relates to producing a titanium complex represented by general formula (1):
(wherein R
1
and R
4
each independently represent an alkyl group having 1-16 carbon atoms; R
2
and R
3
each independently represent a hydrogen atom or an alkyl group having 1-3 carbon atoms; and R
5
represents an alkyl group which has 1-16 carbon atoms and may have been substituted with one or more fluorine atoms) and to producing a titanium-containing thin film using the complex.