申请人:Yamanaka Kazuhiro
公开号:US20100009290A1
公开(公告)日:2010-01-14
Photosensitive polybenzoxazine compositions include a photosensitive additive such as an o-diazoquinone and a polymer comprising a repeating unit represented by the following formula (I) wherein R
1
comprises an aliphatic group, an alicyclic group, an aromatic group, a heterocyclic group, or combinations thereof, R
2
comprises an aliphatic group, an alicyclic group, an aromatic group, a heterocyclic group, or combinations thereof, R
4
comprises a hydrophilic group, a hydrophilic group protected by an acid-cleavable group, a hydrophilic group protected by a base-cleavable group, a cross-linkable group, or combinations thereof, and i represents an integer of 1 or more. The photosensitive compositions may be formed by combining a precursor polymer with a photosensitive additive and a solvent, patterning the precursor polymer, and heating the precursor polymer at a thermal processing temperature in a range of from about 180° C. to about 300° C. to convert the precursor polymer into the final polymer.