A photoresist composition comprising a resin which comprises a structural unit derived from a compound having an acid-labile group and which is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, an acid generator and a compound represented by the formula (I′):
wherein R51, R52, R53 and R54 independently each represent a C1-C8 alkyl group, and A11 represents a C3-C36 divalent saturated cyclic hydrocarbon group which can contain one or more heteroatoms and which have one or more substituents or a C6-C20 divalent aromatic hydrocarbon group which can contain one or more heteroatoms and which have one or more substituents.
一种光阻组合物,包括以下成分:由含有酸敏感基团的化合物衍生的结构单元构成的
树脂,该
树脂在碱性
水溶液中不溶或溶解性差,但在酸的作用下变得可溶于碱性
水溶液;酸发生剂;以及由下式(I')表示的化合物:其中,R51、R52、R53和R54各自独立地表示C1-C8烷基;A11表示一个C3-C36的二价饱和
环烃基,该基团可以含有一个或多个杂原子,并且可以具有一个或多个取代基,或者表示一个C6-C20的二价芳香族烃基,该基团可以含有一个或多个杂原子,并且可以具有一个或多个取代基。