MONOMER FOR HARDMASK COMPOSITION AND HARDMASK COMPOSITION INCLUDING THE MONOMER AND METHOD OF FORMING PATTERNS USING THE HARDMASK COMPOSITION
申请人:LEE Sung-Jae
公开号:US20140186777A1
公开(公告)日:2014-07-03
A monomer for a hardmask composition represented by the following Chemical Formula 1,
一种用以下化学式1表示的硬掩膜组合物的单体。