Norbornene-type polymers, compositions thereof and lithographic processes using such compositions
申请人:Promerus LLC
公开号:EP2031007A2
公开(公告)日:2009-03-04
A top-coat composition comprising a non-self imageable polymer consisting of norbornene-type repeating units, said polymer comprising a first norbornene-type repeating unit represented by Formula I:
where X is -CH2-, -CH2CH2-, O or S; n is an integer from 0 to 5 inclusive; each of R1 to R4 independently represents hydrogen, a linear or branched alkyl group, or a linear or branched haloalkyl group, subject to the proviso that at least one of R1 to R4 is a -QNHSO2R5 group where Q is a linear or branched alkyl spacer of 1 to 5 carbons, and R5 is a perhalo group of 1 to 10 carbon atoms, a solvent and optionally comprising one or more of a crosslinking agent, an acidic material or a surfactant.
一种面漆组合物,包含一种由降冰片烯型重复单元组成的非自显影聚合物,所述聚合物包含由式 I 表示的第一降冰片烯型重复单元:
其中 X 是-CH2-、-CH2CH2-、O 或 S;n 是 0 至 5(包括 5)的整数;R1 至 R4 中的每一个都独立地代表氢、直链或支链烷基或直链或支链卤代烷基,但 R1 至 R4 中至少有一个是-QNHSO2R5 基团,其中 Q 是 1 至 5 个碳原子的直链或支链烷基间隔物,R5 是 1 至 10 个碳原子的全卤基团,溶剂,并可选择包含一种或多种交联剂、酸性物质或表面活性剂。