Composition for forming porous film, porous film and method for forming the same, interlevel insulator film, and semiconductor device
申请人:Matsushita Electric Industrial Co., Ltd.
公开号:US20040232553A1
公开(公告)日:2004-11-25
Provided are a composition for forming porous film which can form a porous film having practical mechanical strength in a simple and low cost process; a porous film and a method for forming the film; and an inexpensive, high-performing and highly reliable semiconductor device comprising the porous film inside. More specifically, provided is a composition for forming porous film, comprising a polymer which is obtainable by hydrolyzing and condensing one or more silane compounds represented by Formula (1), or preferably by hydrolyzing and co-condensing one or more silane compounds represented by Formula (1) and one more silane compounds represented by Formula (2), Formulas (1) and (2) being:
(R
1
)
a
Si(R
2
)
4-a
(1)
(R
3
)
b
Si(R
4
)
4-b
(2)
Also provided is a method for forming porous film comprising a step of applying said composition on a substrate to form film and a step of transforming the film into porous film.