[EN] SYNTHESIS OF VINYL CYCLOBUTYL INTERMEDIATES<br/>[FR] SYNTHÈSE D'INTERMÉDIAIRES DE VINYLCYCLOBUTYLE
申请人:AMGEN INC
公开号:WO2021226009A1
公开(公告)日:2021-11-11
Provided herein are processes for synthesizing intermediates useful in preparing Mcl-1 inhibitors. In particular, provided herein are processes for synthesizing compound F, or a salt thereof, wherein R1 and OPG2 are described herein. Compound F can be useful in synthesizing compound A1, or a salt of solvate thereof, and compound A2, or a salt of solvate thereof.
POLISHING COMPOSITION USING POLISHING PARTICLES THAT HAVE HIGH WATER AFFINITY
申请人:Nissan Chemical Corporation
公开号:EP3876264A1
公开(公告)日:2021-09-08
There is provided a polishing composition comprising silica-based abrasive grains and a polishing method.
A polishing composition comprising silica particles, wherein on the basis of a colloidal silica dispersion of the silica particles, the dispersion has an Rsp of 0.15 to 0.7 as measured using pulse NMR, and the colloidal silica particles have a shape coefficient SF1 of 1.20 to 1.80, wherein Rsp is calculated based on equation (1): Rsp=Rav−Rb/Rb (wherein Rsp is an index that indicates water affinity; Rav is an inverse of a relaxation time of the colloidal silica dispersion; and Rb is an inverse of a relaxation time of a blank aqueous solution obtained by removing the silica particles from the colloidal silica dispersion), and
the shape coefficient SF1 is calculated based on equation (2): SF1=areaofacirclewhosediameterisamaximumdiameteroftheparticle/projectedarea
A polishing liquid for polishing a surface to be polished containing a tungsten material, the polishing liquid comprising abrasive grains; a polymer having a cationic group at the terminal; an oxidizing agent; a metal oxide-dissolving agent; and water, in which the polymer has a structural unit derived from an unsaturated carboxylic acid, a weight average molecular weight of the polymer is 20000 or less, and a pH is less than 5.0.
Photosensitive resin composition, photosensitive dry film, and pattern forming process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US11460774B2
公开(公告)日:2022-10-04
A photosensitive resin composition comprising a polymer containing a silphenylene skeleton and a fluorene skeleton and having a crosslinkable site in the molecule, a phenol compound having a Mw of 300-10,000, a photoacid generator, and a benzotriazole or imidazole compound has improved film properties. Even from a thick film, a fine size pattern can be formed.
There is provided a metal abrasive composition which can polish metal wiring at high speed and control the etching rate thereof in manufacturing a semiconductor device. A metal abrasive composition comprises (a) a chelating resin particle having at least one functional group selected from the group consisting of an aminocarboxylic acid group, an aminophosphonic acid group and an iminodiacetic acid group, (b) an inorganic particle, and (c) a surfactant having at least one functional group selected from a group consisting of a carboxylic acid group, a sulfonic acid group and a phosphoric acid group.