A chemically amplified resist composition comprising a base polymer, an acid generator, and an amine quencher in the form of a β-alanine, γ-aminobutyric acid or 5-aminovaleric acid derivative having an acid labile group-substituted carboxyl group has a high contrast of alkaline dissolution rate before and after exposure and forms a pattern of good profile at a high resolution, minimal roughness and wide focus margin.
一种
化学放大型光刻胶组合物,包括基础聚合物、酸发生剂和胺淬灭剂,后者为
β-丙氨酸、γ-
氨基
丁酸或
5-氨基戊酸的衍
生物,具有一个被酸不稳定基团所取代的羧基,这种组合物在曝光前后具有高对比度的碱性溶解速率,并且能够形成高分辨率、最小粗糙度和宽焦深度的良好图案轮廓。