A fluorocarboxylic acid-containing polymer comprising recurring units having formula (A1), but not acid labile group-containing recurring units is provided. A resist composition comprising the same offers a high sensitivity and is unsusceptible to nano-bridging or pattern collapse independent of whether it is of positive or negative tone.
提供一种含有
氟羧酸的
聚合物,其中包含具有式(A1)的
重复单元,但不含有酸不稳定的
重复单元。包含该
聚合物的抗蚀剂组合物具有高灵敏度,并且无论是正向还是负向调色板,都不易出现纳米桥接或图案坍塌。