作者:A.V.P. Coelho、H. Boudinov
DOI:10.1016/j.nimb.2005.11.149
日期:2006.4
A simple null charge model was employed to describe GaAs sheet resistance evolution as a function of proton implantation fluence using a previous knowledge of the irradiation created defect characteristics. In the specific case of GaAs irradiated with protons, three different irradiation related defect schemes were analyzed. Data obtained by both n-type and p-type majority carrier DLTS should be used together to give correct information about compensating deep centers. For a good estimation of isolation process by ion irradiation, not only the defects energy levels and introduction rates must be obtained, but also the corresponding charge transitions should be known. (c) 2005 Elsevier B.V. All rights reserved.