申请人:Fujifilm Electronic Materials U.S.A., Inc.
公开号:US10036952B2
公开(公告)日:2018-07-31
This disclosure relates to a photosensitive composition that includes at least one fully imidized polyimide polymer having a weight average molecular weight in the range of about 20,000 Daltons to about 70,000 Daltons; at least one solubility switching compound; at least one photoinitiator; and at least one solvent. The composition is capable of forming a film or a dry film having a dissolution rate of greater than about 0.15 micron/second using cyclopentanone as a developer.
本公开涉及一种光敏组合物,它包括至少一种重量平均分子量在约 20,000 道尔顿至约 70,000 道尔顿范围内的全亚胺化聚酰亚胺聚合物;至少一种溶解度切换化合物;至少一种光引发剂;以及至少一种溶剂。使用环戊酮作为显影剂,该组合物能够形成溶解速率大于约 0.15 微米/秒的薄膜或干膜。