RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND COMPOUND
申请人:Nakahara Kazuo
公开号:US20120082934A1
公开(公告)日:2012-04-05
[Problem] To reduce the time required for a film to exhibit decreased hydrophobicity after liquid immersion lithography while allowing the surface of a film to exhibit high hydrophobicity during liquid immersion lithography.
[Solution] A radiation-sensitive resin composition including (A) a polymer that includes a repeating unit (a1) and a fluorine atom, and (B) a photoacid generator, the repeating unit (a1) including a group shown by any of the following formulas (1-1) to (1-3).