CYCLOALIPHATIC MONOMER, POLYMER COMPRISING THE SAME, AND PHOTORESIST COMPOSITION COMPRISING THE POLYMER
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20130171429A1
公开(公告)日:2013-07-04
A monomer has the Formula I:
wherein R
1
, R
2
, and R
3
are each independently a C
1-30
monovalent organic group, and R
1
, R
2
, and R
3
are each independently unsubstituted or include a halogen, nitrile, ether, ester, ketone, alcohol, or a combination comprising at least one of the foregoing functional groups; R
4
includes H, F, C
1-4
alkyl, or C
1-4
fluoroalkyl; A is a single bond or a divalent linker group, wherein A is unsubstituted or substituted to include a halogen, nitrile, ether, ester, ketone, alcohol, or a combination comprising at least one of the foregoing functional groups; m and n are each independently an integer of 1 to 8; and x is 0 to 2n+2, and y is 0 to 2m+2.
单体具有式I:其中R1,R2和R3各自独立地为C1-30单价有机基团,且R1,R2和R3各自独立地未取代或包括卤素,腈,醚,酯,酮,醇或包含上述至少一种功能基团的组合;R4包括H,F,C1-4烷基或C1-4氟烷基;A是单键或二价连接基团,其中A未取代或取代以包括卤素,腈,醚,酯,酮,醇或包含上述至少一种功能基团的组合;m和n各自独立地为1至8的整数;x为0至2n+2,y为0至2m+2。