INORGANIC-CONTAINING PHOTOSENSITIVE RESIN COMPOSITION AND METHOD FOR FORMING INORGANIC PATTERN
申请人:Kansai Research Institute
公开号:EP0965885A1
公开(公告)日:1999-12-22
An inorganic pattern is formed by coating an inorganic substance-containing photosensitive composition comprising a photosensitive polymer (A), a condensable organic metal compound or a condensate thereof (B) and an inorganic filler having a functional group (C) on a base, exposing the coated layer, and developing the exposed layer to form a pattern, baking the pattern give an inorganic pattern. The photosensitive polymer (A) may be constituted of an oligomer or polymer, and a photosensitizer, and the condensable organic metal compound (B) may have a photosensitive group. The inorganic filler may be a monodispersed colloidal silica having a mean particle size of 2 to 100 nm. The proportions of the components (B) and (C) relative to 1 part by weight of the component (A) on a solid basis are about 1 to 25 parts by weight and about 1 to 20 parts by weight, respectively. Even when the content of an inorganic component is high, an inorganic pattern of high resolution can be formed with the use of the above resin composition.
无机图案是通过在基底上涂布由光敏聚合物(A)、可缩合有机金属化合物或其缩合物(B)和具有官能团的无机填料(C)组成的含无机物的光敏组合物,对涂布层进行曝光,并对曝光层进行显影以形成图案,烘烤图案得到无机图案。光敏聚合物(A)可以由低聚物或聚合物和光敏剂构成,可缩合有机金属化合物(B)可以具有光敏基团。无机填料可以是平均粒径为 2 至 100 纳米的单分散胶体二氧化硅。组分(B)和组分(C)相对于 1 重量份组分(A)的固体比例分别为约 1 至 25 重量份和约 1 至 20 重量份。即使无机成分含量较高,使用上述树脂组合物也能形成高分辨率的无机图案。