A monomer of formula (1) is provided wherein R1 is hydrogen or a monovalent C1-C6 hydrocarbon group, and R2 is a group having polymerization functionality. Using the monomer, crosslinking units can be incorporated into a polymer chain. A chemically amplified negative resist composition comprising a base polymer having crosslinking units incorporated therein has a high sensitivity and forms a resist pattern with minimized LER.
提供了式 (1) 单体,其中 R1 是
氢或一价 C1-C6 烃基,R2 是具有聚合官能度的基团。使用该单体可将交联单元加入
聚合物链中。
化学放大阴性抗蚀剂组合物由含有交联单元的
基础聚合物组成,具有高灵敏度,可形成具有最小 LER 的抗蚀图案。