Disclosed is an adhesive sheet for wafer comprising a substrate film (2) and a radiation curable adhesive layer (3) formed thereon, said adhesive sheet being used in a process for preparing a semiconductor device comprising the steps of adhering a back surface of a wafer (A), a front surface of which has been formed a circuit, onto the radiation curable adhesive layer, dicing the wafer into chips (A₁,A₂,...), rinsing, drying, irradiating the adhesive layer with radiation (B) to cure said adhesive layer, expanding the adhesive sheet if necessary to make the chips apart from each other, then picking up the chips, mounting the picked chips on a lead frame, bonding, and molding to give such a structure that the back surfaces of the chips are partially or wholly in contact with a package molding resin, wherein the radiation curable adhesive layer comprises 100 parts by weight of an acrylic adhesive composed of a copolymer of an acrylic ester and an OH group-containing polymerizable monomer and 50 - 200 parts by weight of a radiation polymerizable compound having two or more unsaturated bonds, and the radiation curable adhesive layer has an elastic modulus of not less than 1 × 10⁹dyn/cm² after curing by irradiation with radiation.
本发明公开了一种用于晶片的粘合片,包括基底薄膜 (2) 和在其上形成的辐射固化粘合层 (3),所述粘合片用于制备半导体器件的工艺中,该工艺包括以下步骤:将晶片 (A) 的背面(其正面已形成电路)粘合到辐射固化粘合层上,将晶片切割成芯片 (A₁、A₂、......),冲洗,干燥,用辐射 (B) 照射粘合层以固化所述粘合层,必要时展开粘合片使芯片彼此分开,然后拾取被拾取的芯片 (A₁、A₂、......)。) ,冲洗,烘干,用辐射(B)照射粘合剂层以固化所述粘合剂层,必要时扩大粘合剂片以使芯片彼此分开,然后拾取芯片,将拾取的芯片安装在引线框架上,粘合,成型,使芯片的背面部分或全部与封装成型
树脂接触、其中,辐射固化粘合剂层包括 100 份(按重量计)由
丙烯酸酯和含羟基可聚合单体的共聚物组成的
丙烯酸粘合剂和 50 - 200 份(按重量计)具有两个或两个以上不饱和键的辐射可聚合化合物,并且辐射固化粘合剂层在通过辐射照射固化后具有不小于 1 × 10⁹dyn/cm²的弹性模量。