[EN] THIOXANTHONE DERIVATIVES, COMPOSITION COMPRISING THE SAME AND PATTERN FORMING METHOD COMPRISING SAID COMPOSITION<br/>[FR] DÉRIVÉS DE THIOXANTHONE, COMPOSITION LES COMPRENANT ET PROCÉDÉ DE FORMATION DE MOTIFS COMPRENANT LADITE COMPOSITION
申请人:LINTFIELD LTD
公开号:WO2020016389A1
公开(公告)日:2020-01-23
Latent photoinitiator compounds are described, as well as compositions containing such compounds and their uses in photoinitated methods for producing photoresist structures.
KURBANOV, D.;KURBANOV, I.;TAGANLYEV, A.;XEKIMOV, YU. K.;XODZHALYEV, T. X.+, IZV. AN TSSR. CEP. FIZ.-TEXN., XIM. I GEOL. N.,(1989) N, S. 110-112
作者:KURBANOV, D.、KURBANOV, I.、TAGANLYEV, A.、XEKIMOV, YU. K.、XODZHALYEV, T. X.+
DOI:——
日期:——
SOKOLOVSKIJ, A. V.;ROLNIK, L. Z.;KONDRATEVA, I. A.;ZLOTSKIJ, S. S.;RAXMAN+, IZV. VUZOV. XIMIYA I XIM. TEXNOL., 31,(1988) N 5, 46-49
作者:SOKOLOVSKIJ, A. V.、ROLNIK, L. Z.、KONDRATEVA, I. A.、ZLOTSKIJ, S. S.、RAXMAN+
DOI:——
日期:——
THIOXANTHONE DERIVATIVES, COMPOSITION COMPRISING THE SAME AND PATTERN FORMING METHOD COMPRISING SAID COMPOSITION
申请人:Lintfield Limited
公开号:EP3824349A1
公开(公告)日:2021-05-26
Thioxanthone Derivatives, Composition Comprising the Same and Pattern Forming Method Comprising Said Composition
申请人:LINTFIELD LIMITED
公开号:US20210277017A1
公开(公告)日:2021-09-09
Latent photoinitiator compounds are described, as well as compositions containing such compounds and their uses in photoinitiated methods for producing photoresist structures.