The invention provides an aqueous dispersion for chemical mechanical polishing that is hard to putrefy, scarcely causes scratches, causes only small dishing and is suitable for used in a micro isolating step or a planarizing step of an inter layer dielectric in production of semiconductor devices.
The aqueous dispersion for chemical mechanical polishing comprises ceria particles, a preservative composed of a compound having a heterocyclic structure containing a nitrogen atom and a sulfur atom in the ring, such as an isothiazolone compound, and an organic component such as organic abrasive grains composed of resin particles, a dispersing agent composed of a water-soluble polymer having a specific molecular weight or the like, a surfactant and/or an organic acid or a salt thereof contained in an aqueous medium. The ceria particles, preservative and organic component are contained in proportions of 0.1 to 20 % by mass, 0.001 to 0.2 % by mass and 0.1 to 30 % by mass, respectively, when the total proportion of the aqueous medium, ceria particles, preservative and organic component is 100 % by mass. The pH of this aqueous dispersion can be kept in a neutral range.
本发明提供了一种用于
化学机械抛光的
水性分散液,该分散液不易腐化,几乎不会造成划痕,仅会引起微小的凹凸不平,适用于半导体器件生产中层间电介质的微隔离步骤或平面化步骤。
用于
化学机械抛光的
水性分散液包括
铈颗粒、由具有杂环结构的化合物组成的
防腐剂,该化合物在环中含有一个氮原子和一个
硫原子,例如
异噻唑酮化合物;以及有机成分,例如由
树脂颗粒组成的有机磨粒、由具有特定分子量的
水溶性聚合物或类似物组成的分散剂、表面活性剂和/或有机酸或其在
水性介质中的盐。当
水介质、
铈颗粒、
防腐剂和有机成分的总比例为 100%时,
铈颗粒、
防腐剂和有机成分的质量比例分别为 0.1%至 20%、0.001%至 0.2%和 0.1%至 30%。该
水分散液的 pH 值可保持在中性范围内。