申请人:Nissan Chemical Industries, Ltd.
公开号:EP1329769A1
公开(公告)日:2003-07-23
A novel positive photosensitive resin composition is presented by improving the water repellency at the surface and imparting additional functions to a positive photosensitive resin which can be developed by an alkali aqueous solution and which is excellent in sensitivity and developability, while maintaining such properties.
The positive photosensitive polyimide resin composition comprises (a) a solvent-soluble polyimide wherein from 1 to 100 mol% of a bivalent organic group constituting a diamine, has one or more of at least one group selected from the group consisting of a phenolic hydroxyl group, a carboxyl group, a thiophenol group and a sulfonic group, and the reduced viscosity is from 0.05 to 5.0 dl/g (at a concentration of 0.5 g/dl in N-methyl pyrrolidone at a temperature of 30°C), (b) a photosensitive orthoquinonediazide compound, and (c1) a solvent-soluble polyimide wherein from 1 to 100 mol% of a bivalent organic group constituting a diamine, has one or more of at least one group selected from the group consisting of a long chain alkyl group having at least 6 carbon atoms and a fluorinated alkyl group, and the reduced viscosity is from 0.05 to 5.0 dl/g (at a concentration of 0.5g/dl in N-methylpyrrolidone at a temperature of 30°C) or (c2) a polyamic acid wherein from 1 to 100 mol% of a bivalent organic group constituting a diamine, has one or more of at least one group selected from the group consisting of a long chain alkyl having at least 6 carbon atoms and a fluorinated alkyl group, and the reduced viscosity is from 0.05 to 5.0 dl/g (at a concentration of 0.5 g/dl in N-methylpyrrolidone at a temperature of 30°C), wherein component [c1] or component [c2] is from 0.1 to 50 wt%, based on the total weight of all polymers.
本发明提出了一种新型正性光敏树脂组合物,它通过改善正性光敏树脂表面的憎水性和赋予其附加功能,使其可以用碱水溶液显影,并在保持这些特性的同时,具有优异的灵敏度和显影性。
正性感光聚酰亚胺树脂组合物包括 (a) 溶剂可溶聚酰亚胺,其中 1 至 100 摩尔%的二价有机基团构成二胺,具有一个或多个至少选自酚羟基、羧基、噻吩酚基和磺酸基组成的基团,还原粘度为 0.05 至 5.0 dl/g(在浓度为 0.5克/分升(在N-甲基吡咯烷酮中,温度为30℃),(b)一种光敏原醌噻嗪化合物,和(c1)一种溶剂溶性聚酰亚胺,其中构成二胺的1至100摩尔%的二价有机基团,具有一个或多个至少一个选自至少有6个碳原子的长链烷基和氟化烷基的基团,且降低的粘度为0.05 至 5.0 分升/克(在 N-甲基吡咯烷酮中的浓度为 0.5 克/分升,温度为 30℃)或 (c2) 聚酰胺酸,其中构成二胺的 1 至 100 摩尔%的二价有机基团具有一个或多个选 自至少具有 6 个碳原子的长链烷基和氟化烷基组成的组中的至少一个基团,且降粘 度为 0.05至5.0分升/克(在N-甲基吡咯烷酮中浓度为0.5克/分升,温度为30℃时),其中组分[c1]或组分[c2]占所有聚合物总重量的0.1至50重量%。