According to one embodiment, there is provided a method of forming a pattern, including forming a thermally crosslinkable molecule layer including a thermally crosslinkable molecule on a substrate, forming a photosensitive composition layer including a photosensitive composition on the thermally crosslinkable molecule layer, chemically binding the thermally crosslinkable molecule to the photosensitive composition by heating, selectively irradiating the photosensitive composition layer with energy rays, forming a block copolymer layer including a block copolymer on the photosensitive composition layer, and forming a microphase-separated structure in the block copolymer layer.
根据一种实施方式,提供了一种形成图案的方法,包括在基板上形成包括热交联分子的热交联分子层,形成包括光敏组合物的光敏组合物层在热交联分子层上,通过加热
化学地将热交联分子与光敏组合物结合,选择性地用能量射线照射光敏组合物层,在光敏组合物层上形成包括嵌段共聚物的嵌段共聚物层,并在嵌段共聚物层中形成微相分离结构。