Provided are polymers derived from fluoroalkyl norbornenes, fluorinated crotonates, fluorinated allyl alcohols, and combinations of two or more thereof for use in a wide variety of applications, including photoresist compositions. Also provided are methods for producing the fluoroalkyl norbornenes, fluorinated crotonates, and fluorinated allyl alcohols for use in the present polymers.
                            本发明提供了由氟烷基
降冰片烯、
氟化
巴豆酸盐、
氟化烯丙基醇以及其中两种或两种以上的组合物衍生的聚合物,可用于多种应用领域,包括光刻胶组合物。此外,还提供了用于本聚合物的氟烷基
降冰片烯、
氟化
巴豆酸盐和
氟化烯丙基醇的生产方法。