申请人:Echigo Masatoshi
公开号:US20080113294A1
公开(公告)日:2008-05-15
A radiation-sensitive composition containing 1 to 80% by weight of a solid component and 20 to 99% by weight of a solvent. The solid component contains a compound B which has (a) a structure derived from a polyphenol compound A by introducing an acid-dissociating group to at least one phenolic hydroxyl group of the polyphenol compound A which is synthesized by a condensation between a di- to tetrafunctional aromatic ketone or aromatic aldehyde each having 5 to 36 carbon atoms with a compound having 1 to 3 phenolic hydroxyl groups and 6 to 15 carbon atoms, and (b) a molecular weight of 400 to 2000. The composition containing the compound B is useful as an acid-amplified, non-polymeric resist material, because it is highly sensitive to radiation such as KrF excimer lasers, extreme ultraviolet rays, electron beams, and X-rays, and provides resist patterns with a high resolution, high heat resistance, and high etching resistance.
一种辐射敏感的组合物,包含1至80重量%的固体组分和20至99重量%的溶剂。固体组分包含化合物B,其具有(a)通过向多酚化合物A的至少一个酚羟基引入酸解离基而导出的结构,多酚化合物A通过二元至四元芳香酮或芳香醛的缩合反应,每个具有5至36个碳原子的化合物与具有1至3个酚羟基和6至15个碳原子的化合物结合,并且(b)分子量为400至2000。含有化合物B的组合物非常敏感于辐射,例如KrF准分子激光器,极紫外线,电子束和X射线,并且提供具有高分辨率,高耐热性和高蚀刻抗性的抗阻图案,因此可用作酸放大的非聚合物抗阻材料。