Photosensitive composition containing an ethylenically unsaturated compound, initiator and sensitizer
申请人:AGFA-GEVAERT
naamloze vennootschap
公开号:EP0014012A1
公开(公告)日:1980-08-06
A photosensitive composition of matter suited for the production of polymer resist images which composition comprises a mixture of:
(1) a photopolymerizable ethylenically unsaturated compound,
(2) at least one oxime ester photopolymerisation initiator, and
(3) at least one sensitizer increasing the photopolymerization rate of said composition said sensitizer being defined in two general formulae said formulae including respectively a merocyanine dye, a zeromethine merocyanine dye, a carbostyril compound, an aryl-substituted 2-pyrazoline compound, an aryl-substituted oxazole compound, an aryl-substituted 1,2,4-triazole compound, an aryl-substituted 1,3,4-oxadiazole compound or an aryl-substituted-4-oxazolin-2-one compound.
一种适用于生产聚合物抗蚀剂图像的光敏物质组合物,该组合物由以下物质的混合物组成:
(1) 可进行光聚合的乙烯基不饱和化合物、
(2) 至少一种肟酯类光聚合引发剂,和
(3) 至少一种可提高所述组合物光聚合速率的敏化剂,所述敏化剂定义在两个通式中,所述通式分别包括一种美罗菁华染料、一种齐次甲基美罗菁华染料、一种羧基吡咯烷酮化合物、一种羧基吡咯烷酮化合物、一种羧基吡咯烷酮化合物、一种羧基吡咯烷酮化合物、一种羧基吡咯烷酮化合物、羧基吡咯化合物、芳基取代的 2-吡唑啉化合物、芳基取代的噁唑化合物、芳基取代的 1,2,4-三唑化合物、芳基取代的 1,3,4-恶二唑化合物或芳基取代的 4-噁唑啉-2-酮化合物。