Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
防光晕组合物和减少涂覆上述组合物的光刻胶的曝光辐射反射的方法。本发明的防光晕组合物包括
树脂粘合剂和能使
树脂粘合剂发生热诱导交联反应的材料。