申请人:Kao Corporation
公开号:EP2107093A1
公开(公告)日:2009-10-07
A polishing liquid composition includes composite oxide particles containing cerium and zirconium, a dispersing agent, and an aqueous medium. A powder X-ray diffraction spectrum of the composite oxide particles obtained by CuKα1 ray (λ = 0.154050 nm) irradiation includes a peak (first peak) having a peak top in a diffraction angle 2θ (θ is a Bragg angle) range of 28.61 to 29.67°, a peak (second peak) having a peak top in a diffraction angle 2θ range of 33.14 to 34.53°, a peak (third peak) having a peak top in a dim-action angle 2θ range of 47.57 to 49.63°, and a peak (fourth peak) having a peak top in a diffraction angle 2θ range of 56.45 to 58.91°. A half-width of the first peak is 0.8° or less.
抛光液组合物包括含铈和锆的复合氧化物颗粒、分散剂和水介质。通过 CuKα1 射线(λ = 0.154050 nm)辐照获得的复合氧化物颗粒的粉末 X 射线衍射谱包括一个峰(第一峰),其峰顶的衍射角 2θ(θ 为布拉格角)范围为 28.61 至 29.67° 的峰顶,衍射角 2θ 在 33.14 至 34.53° 范围内的峰顶(第二峰),衍射角 2θ 在 47.57 至 49.63° 范围内的峰顶(第三峰),以及衍射角 2θ 在 56.45 至 58.91° 范围内的峰顶(第四峰)。第一个峰的半宽度为 0.8°或更小。