Photosensitive composition and method for forming pattern using same
申请人:Saito Satoshi
公开号:US20060003254A1
公开(公告)日:2006-01-05
The photosensitive composition of the invention contains a polymer material having a group having a structure represented by following general formula (2), and a photo acid generator generating acid with an ultraviolet ray or an ionizing radiation
wherein m represents an integer of 0 or more.
PHOTOSENSITIVE COMPOSITION AND METHOD FOR FORMING PATTERN USING SAME
申请人:Saito Satoshi
公开号:US20070224549A1
公开(公告)日:2007-09-27
The photosensitive composition of the invention contains a polymer material having a group having a structure represented by following general formula (2), and a photo acid generator generating acid with an ultraviolet ray or an ionizing radiation
wherein m represents an integer of 0 or more.