The present invention provides a resist underlayer forming composition, which is well in heat resistance and gap filling. Further, the present invention provides methods of manufacturing a resist underlayer and semiconductor device using it. [Means for Solution] A composition comprising a allyloxy derivative having a specific group and a solvent, and methods of manufacturing a resist underlayer and semiconductor device using it.
本发明提供了一种具有良好热稳定性和填充性能的抗蚀剂底层组合物。此外,本发明还提供了使用该组合物制造抗蚀剂底层和半导体器件的方法。
【技术方案】本发明提供了一种包含特定基团的
丙烯酰氧基衍
生物和溶剂的组合物,以及使用该组合物制造抗蚀剂底层和半导体器件的方法。