Gagnon et al., Canadian Journal of Research, Section B: Chemical Sciences, 1950, vol. 28, p. 720,725
作者:Gagnon et al.
DOI:——
日期:——
CHRAIBI A.; FILLION H.; LUU DUC C., ANN. PHARM. TRANS., 1980 (1981), 38, NO 5, 429-438
作者:CHRAIBI A.、 FILLION H.、 LUU DUC C.
DOI:——
日期:——
Image quality improvement using helium gas in low voltage variable pressure scanning electron microscopy
作者:E. Oho、N. Asai、S. Itoh
DOI:10.1093/oxfordjournals.jmicro.a023869
日期:2000.1.1
An effective combination of the low voltage and variable pressure (VP) scanning electron microscopy (SEM) are discussed. In low voltage VP-SEM, helium gas is utilized for reducing the amount of scatter of the primary electron beam. Most samples can receive various benefits obtained from the combination of low voltage and low vacuum observation. Compared to a back-scattered electron (BSE) image in air, signal-to-noise ratio (SNR) of a BSE image taken with helium gas is 5.4 times under a pressure of 50 Pa and an accelerating voltage of 1.5 kV.