ACTIVE LIGHT RAY SENSITIVE OR RADIOACTIVE RAY SENSITIVE RESIN COMPOSITION, AND ACTIVE LIGHT RAY SENSITIVE OR RADIOACTIVE RAY SENSITIVE FILM AND PATTERN FORMING METHOD USING THE SAME
申请人:KAWABATA Takeshi
公开号:US20120082939A1
公开(公告)日:2012-04-05
An active light ray sensitive or radioactive ray sensitive resin composition which satisfies high sensitivity, high resolution, good pattern configuration, and good line edge roughness at the same time to a great extent, while having sufficiently good outgassing performance during exposure, and an active light ray sensitive or radioactive ray sensitive film formed by using the composition, and a pattern-forming method, are provided.
The active light ray sensitive or radioactive ray sensitive resin composition according to the present invention includes a resin (P) containing a repeating unit (A) which decomposes by irradiation with active light ray or radioactive ray to generate an acid, and a repeating unit (C) containing a primary or secondary hydroxyl group.
提供了一种活性光线敏感或放射线敏感的树脂组合物,其在很大程度上同时满足高灵敏度、高分辨率、良好的图案配置和良好的线边粗糙度,同时在曝光期间具有足够好的排气性能,以及使用该组合物形成的活性光线敏感或放射线敏感薄膜和形成图案的方法。本发明的活性光线敏感或放射线敏感的树脂组合物包括含有重复单元(A)的树脂(P),该重复单元通过活性光线或放射线辐射分解生成酸,并且含有主要或次要羟基的重复单元(C)。