ORGANIC ANTI-REFLECTIVE LAYER COMPOSITION CONTAINING RING-OPENED PHTHALIC ANHYDRIDE AND METHOD FOR PREPARATION THEREOF
申请人:Lee Jong-Don
公开号:US20110272643A1
公开(公告)日:2011-11-10
A light absorbent for forming an organic anti-reflective layer, represented by the following formula 1 or formula 2, is provided:
wherein A represents a substituted or unsubstituted, linear or branched, saturated tetravalent hydrocarbon group, a substituted or unsubstituted, linear or branched, saturated hydrocarbon group and containing one or more heteroatoms, a substituted or unsubstituted aromatic group, a substituted or unsubstituted heteroaromatic group, a substituted or unsubstituted alicyclic group, a substituted or unsubstituted heteroalicyclic group, a substituted or unsubstituted diaryl ether, a substituted or unsubstituted diaryl sulfide, a substituted or unsubstituted diaryl sulfoxide, a substituted or unsubstituted diaryl ketone, or a substituted or unsubstituted diaryl bisphenol A; R
1
, R
2
, and R
3
each independently represent a hydrogen atom, a halogen atom, a substituted or unsubstituted alkyl group, a substituted or unsubstituted aryl group, a substituted or unsubstituted acetal group, or a substituted or unsubstituted hydroxyl group; and n is an integer from 2 to 500.