申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20190137873A1
公开(公告)日:2019-05-09
The present invention can provide a salt and a resist composition including the salt, capable of producing a resist pattern with satisfactory line edge roughness (LER).
A salt represented by formula (I):
wherein R
1
and R
2
each represent a chain hydrocarbon group which may have a substituent, an alicyclic hydrocarbon group which may have a substituent or an aromatic hydrocarbon group which may have a substituent, or R
1
and R
2
are bonded each other to form a ring together with sulfur atoms to which they are bonded, R
3
, R
4
and R
5
each independently represent a hydrogen atom, a fluorine atom or a hydrocarbon group having 1 to 12 carbon atoms, —CH
2
— included in the hydrocarbon group may be replaced by —O— or —CO—, and A
−
represents a counter anion.
本发明提供了一种盐和包括该盐的抗蚀剂组合物,能够产生具有令人满意的线边粗糙度(LER)的抗蚀图案。该盐由式(I)表示:其中R1和R2各代表可能具有取代基的链烃基,可能具有取代基的脂环烃基或可能具有取代基的芳香烃基,或者R1和R2彼此相连以形成与它们结合的硫原子一起的环,R3、R4和R5各自独立地表示氢原子、氟原子或具有1至12个碳原子的烃基,烃基中包括的—CH2—可以被—O—或—CO—所取代,A-表示反离子。