A photoresist composition comprising
(A) a resin which has an acid-labile group-containing structural unit and a lactone ring-containing structural unit, and
(B) a salt represented by formula (I):
wherein Q
1
and Q
2
each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group,
n represents 0 or 1,
L
1
represents a single bond or a C1-C10 alkanediyl group in which a methylene group may be replaced by an oxygen atom or a carbonyl group, provided that L
1
is not a single bond when n is 0,
R
1
represents a hydroxy group or a hydroxy group protected by a protecting group, and
Z
+
represents an organic cation.
一种包括(A)具有含酸敏感基团结构单元和含内酯环结构单元的
树脂,以及(B)由式(I)表示的盐的光刻胶组合物:其中Q1和Q2分别独立表示
氟原子或C1-C6
全氟烷基基团,n表示0或1,L1表示单键或C1-C10脂肪二基基团,其中亚甲基基团可被氧原子或羰基取代,但当n为0时,L1不是单键,R1表示羟基或被保护基团保护的羟基,Z+表示有机阳离子。