Fabrication of coatings based on epoxy resins for environmental protection of microelectronics
作者:A. P. Krysin、O. I. Yakovlev
DOI:10.1134/s1070427213070094
日期:2013.7
Modified coating for protection of microelectronics from external effects, including radiation, was created on the basis of epoxy resins. The coating was produced with a modifier, thioalkaphene B, containing polysulfide derivatives of ortho-tert-butyl phenol. The mechanism of its action was explained. The technology for coating deposition was tested on an industrial automated line; the thus protected semiconductor devices successfully passed tests in extreme working conditions.