Crosslinked Polymeric Dielectric Materials And Electronic Devices Incorporating Same
申请人:Marks Tobin J.
公开号:US20110024729A1
公开(公告)日:2011-02-03
Solution-processable dielectric materials are provided, along with precursor compositions and processes for preparing the same. Composites and electronic devices including the dielectric materials also are provided.
BURMAKOV, A. I.;STEPANOV, I. V.;KUNSHENKO, B. V.;SEDOVA, L. N.;ALEKSEEVA,+, ZH. ORGAN. XIMII, 1982, 18, N 6, 1168-1173
作者:BURMAKOV, A. I.、STEPANOV, I. V.、KUNSHENKO, B. V.、SEDOVA, L. N.、ALEKSEEVA,+
DOI:——
日期:——
FLUORINATED MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:SAGEHASHI Masayoshi
公开号:US20110250539A1
公开(公告)日:2011-10-13
A fluorinated monomer has formula (1) wherein R
1
is H, F, methyl or trifluoromethyl, R
2
and R
3
are H or a monovalent hydrocarbon group, R
4
to R
6
each are a monovalent fluorinated hydrocarbon group, A is a divalent hydrocarbon group, and k
1
is 0, 1 or 2. A polymer derived from the fluorinated monomer may be endowed with appropriate water repellency, water slip, acid lability and hydrolysis and is useful as an additive polymer in formulating a resist composition.