申请人:Ciba-Geigy Corporation
公开号:US04736055A1
公开(公告)日:1988-04-05
Oxime sulfonates of formula I ##STR1## wherein Y is a polymerizable unsaturated group or epoxide group or an --OH, --NHR.sup.5, --COOH, COOR.sup.6, --COCl, --CH.sub.2 Hal, --SO.sub.2 Cl or --NCO group, Z is an (x+y)-valent connecting member, R.sup.1 and R.sup.2 are monovalent organic radicals, m is 0 or 1, x is 1 or 2 and y is 1 or 2, can be converted into polymers which can be thermally or photochemically dissociated to form free sulfonic acid groups. Said polymers can therefore be used as photoresists which can be developed with aqueous alkalis.
氧肟磺酸酯的化学式为I,其中Y是可聚合的不饱和基团或环氧基团,或者是—OH、—NHR^5、—COOH、COOR^6、—COCl、—CH_2Hal、—SO_2Cl或—NCO基团,Z是(x+y)-价连接成员,R^1和R^2是一价有机基团,m为0或1,x为1或2,y为1或2。这些化合物可以转化为可以在热或光化学条件下解离成游离磺酸基团的聚合物。因此,这些聚合物可用作光刻胶,可以用水性碱液显影。