A radiation-sensitive resin composition comprising (A) a compound of the following formula (1),
1
(R
1
, R
2
, and R
3
is hydrogen, hydroxyl group, or monovalent organic group and R
4
is monovalent acid-dissociable group), (B) analkali insoluble or scarcely soluble resin comprising a recurring unit of the following formula (2),
2
(R
5
is hydrogen or monovalent organic group, R
40
hydrogen or methyl, n
1
-
3
, m
0
-
3
) and a recurring unit containing acid-dissociable group, and (C) a photoacid generator. The resin composition is useful as a chemically amplified resist, exhibits high sensitivity, resolution, radiation transmittance, and surface smoothness, and is free from the problem of partial insolublization during overexposure.
一种辐射敏感性
树脂组合物,包括(A)下式(1)的化合物、
1
(R
1
, R
2
和 R
3
是氢、羟基或单价有机基团,且 R
4
是一价酸可分解基团),(B) 碱不溶性或难溶性
树脂,包含下式(2)的重复单元、
2
(R
5
是氢或一价有机基团,R
40
氢或甲基,n
1
-
3
, m
0
-
3
(C) 光酸发生器。这种
树脂组合物可用作
化学放大抗蚀剂,具有高灵敏度、高分辨率、高辐射透过率和表面光滑度,而且不会在过度曝光时出现部分不溶解的问题。