RESIST UNDERLAYER FILM FORMING COMPOSITION CONTAINING SILICONE HAVING ONIUM GROUP
申请人:Shibayama Wataru
公开号:US20110143149A1
公开(公告)日:2011-06-16
There is provided a resist underlayer film forming composition for lithography for forming a resist underlayer film capable of being used as a hard mask or a bottom anti-reflective coating, or a resist underlayer film causing no intermixing with a resist and having a dry etching rate higher than that of the resist. A film forming composition comprising a silane compound having an onium group, wherein the silane compound having an onium group is a hydrolyzable organosilane having, in a molecule thereof, an onium group, a hydrolysis product thereof, or a hydrolysis-condensation product thereof. The composition uses as a resist underlayer film forming composition for lithography. A composition comprising a silane compound having an onium group, and a silane compound having no onium group, wherein the silane compound having an onium group exists in the whole silane compound at a ratio of less than 1% by mol, for example 0.01 to 0.95% by mol. The hydrolyzable organosilane may be a compound of Formula: R
1
a
R
2
b
Si(R
3
)
4-(a+b)
. A resist underlayer film obtained by applying the composition as claimed in any one of claims
1
to
14
onto a semiconductor substrate and by baking the composition.
Nouvelles compositions sous forme de microglobules à base de polyamines tertiaires partiellement quaternisées, contenant des substances hydrophobes, leur préparation et leur application
申请人:Etablissement Public dit: CENTRE NATIONAL
DE LA RECHERCHE
SCIENTIFIQUE (CNRS)
公开号:EP0120757A1
公开(公告)日:1984-10-03
Composition sous forme de microglobules solubles dans l'eau.
Lesdits globules sont constitués par au moins une polyamine tertiaire partiellement quaternisée, dans lesdits microglobules est incorporée au moins une substance hydrophobe, ladite polyamine tertiaire partiellement quaternisée dérive d'une polyamine tertiaire insoluble dans l'eau, soluble en milieu acide, et présentant un fort pouvoir tampon en milieu aqueux; et procédé de solubilisation de substances hydrophobes.