A waveguide device comprising at least a waveguiding layer, a cladding layer and, optionally, an adhesion-enhancing layer is disclosed. By using specific fluorinated polyimides as materials for each of the layers of the waveguide device, the process for producing the waveguide device is simplified, the production cost is reduced, and the flexibility is imparted to the waveguide device, which are not achieved in a quartz-type waveguide. Also, a single mode, a low loss at 1.3 micron band and a high moisture-resistance which are not achieved by conventional plastic-type waveguide are possible.
本发明公开了一种波导装置,该装置至少包括一个波导层、一个包层和一个附着力增强层。通过使用特定的
氟化聚
酰亚胺作为波导器件各层的材料,简化了波导器件的生产工艺,降低了生产成本,并赋予了波导器件石英型波导无法实现的灵活性。此外,还可以实现传统塑料型波导无法实现的单模、1.3 微米波段的低损耗和高防潮性。