Photographic articles comprising a compound having acetylenic bonds and methods for producing the articles
申请人:UNIVERSITY PATENTS, INC.
公开号:EP0077577A2
公开(公告)日:1983-04-27
This invention provide a novel photoresistive article having significantly improved properties of resultion when used as a photoresist. The article comprising a substrate and a layer carried by said substrate of a photopolymerizable composition which layer comprises at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another and having a plurality of discrete domains. In one embodiment of the invention, within the discrete domain, a majority of the molecules of the material are oriented in an irregular array. The domains may have an average dimension of less than 10,000 angstom units and provides enhanced resolution of micro-structural lines in an image projected thereon.
本发明提供了一种新型光致抗蚀剂制品,该制品在用作光致抗蚀剂时,其结果性能得到明显改善。 该制品包括基底和由所述基底承载的一层可光聚合的组合物,该层包括至少一种具有至少两个乙炔键的材料,其中至少两个键彼此共轭,并具有多个离散畴。 在本发明的一个实施例中,在离散畴内,材料的大部分分子以不规则阵列的方式定向。 这些畴的平均尺寸可小于 10,000 个角单位,并可提高投射到其上的图像中的微观结构线的分辨率。