The invention provides useful organic insulating materials exhibiting low permittivity, high heat resistance and high mechanical strength, as well as resin films and semiconductor devices employing them. The organic insulating materials of the invention comprise prepolymers of adamantane structure compounds having polymerizable unsaturated bond-containing groups. The prepolymers have number-average molecular weights of between 2,000 and 500,000 based on polystyrene, as measured by gel permeation chromatography. The polymerizable unsaturated bond-containing groups are preferably groups that contain carbon-carbon triple bonds. The resin films of the invention are obtained by crosslinking reaction of the organic insulating materials or varnishes for resin film containing them, by heating and/or active irradiation, and condensation reaction.
本发明提供了有用的有机绝缘材料,具有低介电常数、高耐热性和高机械强度,以及采用它们的
树脂薄膜和半导体器件。本发明的有机绝缘材料包括具有可聚合不饱和键含基团的
金刚烷结构化合物的预聚物。根据凝胶渗透色谱法,预聚物的数均分子量在聚
苯乙烯基础上为2,000至500,000之间。可聚合不饱和键含基团最好是含有碳-碳三键的基团。本发明的
树脂薄膜是通过加热和/或活性辐射以及缩合反应交联反应有机绝缘材料或含有它们的
树脂薄膜漆制得的。