LAMINATE AND METHOD FOR FORMATION THEREOF, INSULATING FILM, SEMICONDUCTOR DEVICE, AND COMPOSITION FOR FORMING FILM
申请人:JSR Corporation
公开号:EP1679184A1
公开(公告)日:2006-07-12
A laminate having a low relative dielectric constant and exhibiting excellent adhesion, a method of forming the laminate, an insulating film, a semiconductor device, and a film-forming composition are provided.
A laminate according to the invention includes: a first silica-based film; a second silica-based film; and an organic film, wherein the second silica-based film includes a monovalent organic group containing a carbon-carbon double bond or a carbon-carbon triple bond.
A method of forming a laminate according to the invention includes: forming a first coating for a first silica-based film on a substrate; forming a second coating for a second silica-based film on the first coating, the second coating including a monovalent organic group containing a carbon-carbon double bond or a carbon-carbon triple bond; forming a third coating for an organic film on the second coating; and curing a multilayer film including the first to third coatings.
本发明提供了一种具有低相对介电常数并表现出优异附着力的层压板、一种形成该层压板的方法、一种绝缘膜、一种半导体器件和一种成膜组合物。
根据本发明的层压板包括:第一硅基薄膜;第二硅基薄膜;以及有机薄膜,其中第二硅基薄膜包括含有碳碳双键或碳碳三键的一价有机基团。
根据本发明形成层压板的方法包括:在基底上形成第一硅基薄膜的第一涂层;在第一涂层上形成第二硅基薄膜的第二涂层,第二涂层包括含有碳碳双键或碳碳三键的一价有机基团;在第二涂层上形成有机薄膜的第三涂层;以及固化包括第一至第三涂层的多层薄膜。