申请人:DAICEL CHEMICAL INDUSTRIES, LTD.
公开号:EP1584634A1
公开(公告)日:2005-10-12
A polymeric compound for photoresist of the present invention includes a monomer unit having 2, 6-dioxabicyclo [3.3.0] octane skeleton in the structure. The monomer unit having 2,6-dioxabicyclo[3.3.0]octane skeleton includes a monomer unit represented by the following Formula (I) :
wherein R is a hydrogen atom or a methyl group. The polymeric compound for photoresist may include a monomer unit having 2, 6-dioxabicyclo [3.3.0] octane skeleton, a monomer unit having a group of adhesion to substrate, and a monomer unit having an acid-eliminating group. The polymeric compound for photoresist of the present invention exhibits not only adhesion to substrate, acid-eliminating property and resistance to dry-etching but also has well-balanced solubility in solvents for photoresist and alkali-soluble property.
本发明的光刻胶用聚合化合物包括结构中具有 2,6-二氧杂环[3.3.0]辛烷骨架的单体单元。具有 2,6-二氧杂环[3.3.0]辛烷骨架的单体单元包括下式(I)所代表的单体单元:
其中 R 是氢原子或甲基。光刻胶用高分子化合物可包括具有 2,6-二氧杂环[3.3.0]辛烷骨架的单体单元、具有与基材粘合基团的单体单元和具有酸消除基团的单体单元。本发明的光刻胶用高分子化合物不仅具有对基底的粘附性、酸消除性和抗干蚀性,而且在光刻胶用溶剂中的溶解性和碱溶性也非常均衡。