申请人:Kumon Soichi
公开号:US09228120B2
公开(公告)日:2016-01-05
Disclosed is a liquid chemical for forming a water-repellent protecting film at least on a surface of a recessed portion of an uneven pattern at the time of cleaning a wafer having a finely uneven pattern at its surface and containing silicon at least a part of the uneven pattern. This liquid chemical contains a silicon compound A represented by the general formula: R1aSi(H)bX4-a-b and an acid A, the acid A being at least one selected from the group consisting of trimethylsilyl trifluoroactate, trimethylsilyl trifluoromethanesulfonate, dimethylsilyl trifluoroactate, dimethylsilyl trifluoromethanesulfonate, butyldimethylsilyl trifluoroactate, butyldimethylsilyl trifluoromethanesulfonate, hexyldimethylsilyl trifluoroacetate, hexyldimethylsilyl trifluoromethanesulfonate, octyldimethylsilyl trifluoroactate, octyldimethylsilyl trifluoromethanesulfonate, decyldimethylsilyl trifluoroacetate and decyldimethylsilyl trifluoromethanesulfonate.
本发明涉及一种液体化学品,用于在清洗具有表面微细不均匀图案并且至少包含硅的不均匀图案的晶片时,在凹陷部分的表面上形成防水保护膜。该液体化学品包含一种由通式表示的硅化合物A:R1aSi(H)bX4-a-b和一种酸A,其中酸A至少选自以下组 consisting of trimethylsilyl trifluoroactate,trimethylsilyl trifluoromethanesulfonate,dimethylsilyl trifluoroactate,dimethylsilyl trifluoromethanesulfonate,butyldimethylsilyl trifluoroactate,butyldimethylsilyl trifluoromethanesulfonate,hexyldimethylsilyl trifluoroacetate,hexyldimethylsilyl trifluoromethanesulfonate,octyldimethylsilyl trifluoroactate,octyldimethylsilyl trifluoromethanesulfonate,decyldimethylsilyl trifluoroacetate和decyldimethylsilyl trifluoromethanesulfonate。