Adhesion layer composition, method for forming film by nanoimprinting, methods for manufacturing optical component, circuit board and electronic apparatus
申请人:CANON KABUSHIKI KAISHA
公开号:US10073341B2
公开(公告)日:2018-09-11
In nanoimprinting processes, photo-cured products often separate from the substrate and stick to the mold due to insufficient adhesion between the photo-cured product and the substrate. This causes a defect of pattern separation.
An adhesion layer composition used for forming an adhesion layer between a substrate and a photocurable composition includes a compound (A) having at least two functional groups, and a solvent (B). The functional groups include at least one functional group capable of being bound to the substrate, selected from the group consisting of hydroxy, carboxy, thiol, amino, epoxy, and (blocked) isocyanate, and at least one hydrogen donating group as a functional group capable of being bound to the photocurable composition.
在纳米压印工艺中,由于光固化产品与基底之间的附着力不足,光固化产品经常会与基底分离并粘在模具上。这会造成图案分离的缺陷。
用于在基底和光固化组合物之间形成粘合层的粘合层组合物包括具有至少两个官能团的化合物(A)和溶剂(B)。官能团包括至少一个能与基底结合的官能团,该官能团选自羟基、羧基、硫醇、氨基、环氧和(封端)异氰酸酯组成的组,以及至少一个作为能与光固化组合物结合的官能团的供氢基团。