申请人:JSR Corporation
公开号:EP1522567A1
公开(公告)日:2005-04-13
The present invention relates to a method of temporarily and firmly fixing two solids to each other and to a composition used in the method, which is a method of temporarily fixing, comprising temporarily fixing the two solids to each other with a liquid crystal compound or a composition comprising the liquid crystal compound. This method is used for a method of temporarily fixing a pad for chemical mechanical polishing, for example, to polish a wafer for a semiconductor device fixed on a surface of a base plate, when one solid is a pad for chemical mechanical polishing of a wafer for a semiconductor device and the other is a base plate to fix the pad.
本发明涉及一种将两个固体暂时牢固地相互固定的方法以及用于该方法的组合物,该方法是一种暂时固定的方法,包括用液晶化合物或包含液晶化合物的组合物将两个固体暂时相互固定。该方法用于临时固定化学机械抛光垫的方法,例如,用于抛光固定在底板表面上的半导体器件晶片,其中一个固体是用于半导体器件晶片化学机械抛光的垫,另一个固体是用于固定垫的底板。