PHOTODECOMPOSABLE BASES AND PHOTORESIST COMPOSITIONS
申请人:Ayothi Ramakrishnan
公开号:US20130052585A1
公开(公告)日:2013-02-28
Provided are novel symmetrical and asymmetrical bifunctional photodecomposable bases (PDBs) with dicarboxylate anion groups that show increased imaging performance. Also provided are photoresist compositions prepared with the bifunctional dicarboxylated PDBs and lithography methods that use the photoresist compositions of the present invention.
Photodecomposable bases and photoresist compositions
申请人:Ayothi Ramakrishnan
公开号:US08614047B2
公开(公告)日:2013-12-24
Provided are novel symmetrical and asymmetrical bifunctional photodecomposable bases (PDBs) with dicarboxylate anion groups that show increased imaging performance. Also provided are photoresist compositions prepared with the bifunctional dicarboxylated PDBs and lithography methods that use the photoresist compositions of the present invention.